| ISO/TR 15969:2001, Surface chemical analysis - Depth profiling - Measurement of sputtered depth |  | Author: ISO/TC 201/SC 4
Publisher: Multiple. Distributed through American National Standards Institute (ANSI)
Category: Book
Buy New: $82.00
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Seller: Amazon.com
Sales Rank: 2,972,957
Language: English (Published)
Media: Paperback
Pages: 24
Shipping Weight (lbs): 0.2
Dimensions (in): 10.5 x 8.3 x 0.1
ASIN: B000XYT7EI
Publication Date: August 23, 2007
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Product Description
This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. This title may contain less than 24 pages of technical content.
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